Products and Services
Dedicated to the R&D of Fluorine-Based Materials, Products, Processes, and Technologies.
Fluorine-Based Electronic Gas Production Plant
- The fluorine gas reacts with non-metals or certain metals to generate perfluorinated compound gases, which, after purification, can be used in processes such as etching, doping, and cleaning in the semiconductor industry. These gases are an important category of electronic materials and play an extremely critical role in semiconductor manufacturing. It main includes:F₂/N₂、NF₃、SF₆、WF₆、PF₃、PF₅、CF₄、C₂F₆、C₃F₈、MoF₆ ...。
- Our company possesses the technology to produce most fluorine-containing electronic gases and is capable of undertaking full-process engineering projects for these gas production systems, including design, fabrication, installation, and commissioning.
Contact Us
Address: Room 1620, 16th Floor, Life Science Park, Fenghua Road, High-tech Zone, Luoyang City
Telephone: +86-379-64310096
Telephone: Mr. Luo +86-15670394742
E-mail: sunland667@163.com
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