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Non-Metallic Perfluorinated Gas Compounds

Our company can provide users with a full range of engineering technical services from design to installation and testing for production facilities of various scales.

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Non-Metallic Perfluorinated Gas Compounds


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Product Description

Non-metallic perfluorinated gas compounds used in the electronics industry typically include:

Fluoronitrogen compounds:NF3;
Fluorocarbon compounds:CF4、C2F6、C3F8、COF2 ……;
Fluorosulfur compounds:SF4、SF6;
Fluorophosphorus compounds:PF3、PF5;
Fluorine-arsenic compounds:AsF3、AsF5;
Fluorine-halogen compounds:ClF3 、BrF3、IF5;
……。
Our company possesses the technology for the production of the above high-purity gases and can provide comprehensive engineering services, including design, installation, and commissioning, for production plants of various scales.

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Our company can provide users with a full range of engineering technical services from design to installation and testing for production facilities of various scales.


Our company possesses the technology for the production of the above high-purity gases and can provide comprehensive engineering services, including design, installation, and commissioning, for production plants of various scales.


Application: research and development of lasers, nanomaterials, etc. Features: metal electrodes, on-demand production, no storage required, simple safety management.

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