Non-Metallic Perfluorinated Gas Compounds
Our company can provide users with a full range of engineering technical services from design to installation and testing for production facilities of various scales.
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Non-Metallic Perfluorinated Gas Compounds
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Product Description
Non-metallic perfluorinated gas compounds used in the electronics industry typically include:
Fluoronitrogen compounds:NF3;
Fluorocarbon compounds:CF4、C2F6、C3F8、COF2 ……;
Fluorosulfur compounds:SF4、SF6;
Fluorophosphorus compounds:PF3、PF5;
Fluorine-arsenic compounds:AsF3、AsF5;
Fluorine-halogen compounds:ClF3 、BrF3、IF5;
……。
Our company possesses the technology for the production of the above high-purity gases and can provide comprehensive engineering services, including design, installation, and commissioning, for production plants of various scales.
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